US 12,414,364 B2
Semiconductor device
Ju Youn Kim, Suwon-si (KR); and Gi Gwan Park, Hwaseong-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Apr. 28, 2022, as Appl. No. 17/731,316.
Application 16/117,065 is a division of application No. 15/413,680, filed on Jan. 24, 2017, granted, now 10,068,901, issued on Sep. 4, 2018.
Application 17/731,316 is a continuation of application No. 16/117,065, filed on Aug. 30, 2018, granted, now 11,355,492.
Claims priority of application No. 10-2016-0008981 (KR), filed on Jan. 25, 2016; application No. 10-2016-0028719 (KR), filed on Mar. 10, 2016; application No. 10-2016-0028822 (KR), filed on Mar. 10, 2016; and application No. 10-2016-0029542 (KR), filed on Mar. 11, 2016.
Prior Publication US 2022/0262793 A1, Aug. 18, 2022
Int. Cl. H10D 84/83 (2025.01); H10B 10/00 (2023.01); H10D 1/00 (2025.01); H10D 30/62 (2025.01); H10D 64/01 (2025.01); H10D 64/27 (2025.01); H10D 64/66 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01)
CPC H10D 84/834 (2025.01) [H10B 10/12 (2023.02); H10D 1/00 (2025.01); H10D 30/6213 (2025.01); H10D 64/017 (2025.01); H10D 64/517 (2025.01); H10D 64/518 (2025.01); H10D 64/667 (2025.01); H10D 84/014 (2025.01); H10D 84/0142 (2025.01); H10D 84/0158 (2025.01); H10D 84/038 (2025.01); H10D 84/83 (2025.01)] 11 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a substrate including a first active region, a second active region, and a first field insulating layer between the first active region and the second active regions, the first field insulating layer directly contacting the first active region and the second active regions; and
a first gate structure on the substrate, the first gate structure crossing the first active region, the second active region, and the first field insulating layer,
wherein the first gate structure includes a first p-type gate electrode and a first n-type gate electrode directly contacting each other,
wherein the first p-type gate electrode includes a first work function layer on the first active region and the first field insulating layer, and a first upper conductive layer on the first work function layer,
wherein the first n-type gate electrode includes a second work function layer on the second active region and the first field insulating layer, and a second upper conductive layer on the second work function layer,
wherein the first work function layer and the second work function layer are in direct contact with each other and are formed of the same material layer,
wherein a thickness of the first work function layer is different from a thickness of the second work function layer, and
wherein an overlapping width of the first p-type gate electrode and the first field insulating layer is different from an overlapping width of the first n-type gate electrode and the first field insulating layer.