| CPC H04R 7/04 (2013.01) [H04R 1/025 (2013.01); H04R 9/025 (2013.01); H04R 9/047 (2013.01); H04R 9/06 (2013.01); H04R 2201/003 (2013.01)] | 20 Claims |

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1. A package structure of a micro speaker, comprising: a substrate having a hollow chamber; a membrane, disposed on the substrate, covering the hollow chamber;
a multi-layers coil includes a first metal layer and a second metal layer embedded in the membrane, wherein the coil comprises: a spiral structure located in a center of the membrane; and a wavy structure extending from the spiral structure to a periphery of the membrane; and a magnetic element disposed in the hollow chamber, wherein a vent hole is formed in and penetrates the membrane, and in a top view, the vent hole is separated from the coil, located on a side opposite to the wavy structure, and is in fluid communication with and is aligned communicates with and overlaps with the hollow chamber.
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