US 12,413,198 B2
Acoustic wave device
Kazunori Inoue, Nagaokakyo (JP); Katsumi Suzuki, Nagaokakyo (JP); and Tetsuya Kimura, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Sep. 20, 2023, as Appl. No. 18/370,653.
Application 18/370,653 is a continuation of application No. PCT/JP2022/016229, filed on Mar. 30, 2022.
Claims priority of provisional application 63/168,338, filed on Mar. 31, 2021.
Prior Publication US 2024/0014795 A1, Jan. 11, 2024
Int. Cl. H03H 9/02 (2006.01); H03H 9/205 (2006.01)
CPC H03H 9/02015 (2013.01) [H03H 9/02086 (2013.01); H03H 9/205 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave device, comprising:
a support including a support substrate with a thickness in a first direction;
a piezoelectric layer on the support in the first direction; and
resonators each including a functional electrode on the piezoelectric layer in the first direction; wherein
the support includes space portions at positions where the respective resonators at least partially overlap in plan view in the first direction;
the space portions include a first space portion and a second space portion with an area larger than an area of the first space portion in plan view in the first direction;
the piezoelectric layer includes a first through-hole communicating with the first space portion and a second through-hole communicating with the second space portion; and
the first through-hole has an area larger than an area of the second through-hole in plan view in the first direction.