US 12,413,050 B2
Multi-color visible light source including integrated VCSELs and integrated photonic cavities
Zhimin Shi, Bellevue, WA (US); Maik Andre Scheller, Redmond, WA (US); Gareth Valentine, Kirkland, WA (US); and James Ronald Bonar, Redmond, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed on Jun. 10, 2021, as Appl. No. 17/344,744.
Claims priority of provisional application 63/179,913, filed on Apr. 26, 2021.
Prior Publication US 2022/0345220 A1, Oct. 27, 2022
Int. Cl. H01S 5/42 (2006.01); G02F 1/35 (2006.01); G02F 1/39 (2006.01); H01S 3/108 (2006.01); H01S 5/00 (2006.01); H01S 5/026 (2006.01); H01S 5/04 (2006.01); H01S 5/11 (2021.01); H01S 5/14 (2006.01); H01S 5/183 (2006.01); H01S 5/50 (2006.01); H04B 10/116 (2013.01)
CPC H01S 5/423 (2013.01) [G02F 1/3536 (2013.01); G02F 1/39 (2013.01); H01S 3/1083 (2013.01); H01S 5/0064 (2013.01); H01S 5/0261 (2013.01); H01S 5/041 (2013.01); H01S 5/11 (2021.01); H01S 5/141 (2013.01); H01S 5/142 (2013.01); H01S 5/18355 (2013.01); H01S 5/18377 (2013.01); H01S 5/5054 (2013.01); H04B 10/116 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A visible light source comprising:
a substrate;
a vertical-cavity surface-emitting laser on the substrate and comprising:
an active semiconductor region configured to emit infrared light; and
a first reflector configured to reflect the infrared light emitted by the active semiconductor region;
a second reflector configured to reflect the infrared light, the first reflector and the second reflector forming a vertical cavity for the infrared light;
one or more micro-resonators within the vertical cavity, each of the one or more micro-resonators on a respective layer different from the active semiconductor region and configured to resonate within the respective layer, the one or more micro-resonators configured to receive the infrared light incident on the one or more micro-resonators vertically and generate visible light in one or more colors using the infrared light through optical parametric oscillation; and
one or more output couplers configured to couple the visible light in one or more colors from the one or more micro-resonators into free space or into a photonic integrated circuit.