US 12,412,727 B2
Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof
Pieter Kruit, Delft (NL); and John Breuer, Munich (DE)
Assigned to ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH, Heimstetten (DE)
Filed by ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH, Heimstetten (DE)
Filed on Nov. 21, 2022, as Appl. No. 17/991,168.
Prior Publication US 2024/0170249 A1, May 23, 2024
Int. Cl. H01J 37/153 (2006.01); G01N 23/2251 (2018.01); H01J 37/147 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [G01N 23/2251 (2013.01); H01J 37/1472 (2013.01); H01J 37/28 (2013.01); G01N 2223/079 (2013.01); G01N 2223/418 (2013.01); G01N 2223/507 (2013.01); H01J 2237/151 (2013.01); H01J 2237/1534 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A corrector for correcting aberrations of a charged particle beam in a charged particle beam device, comprising:
a plurality of wires configured to be in a plane perpendicular to a beam axis, the wires forming two or more openings for passing of the charged particle beam through the two or more openings, the plurality of wires comprising at least:
a first wire configured to be biased to provide a first voltage to the first wire; and
a second wire configured to be biased to provide a second voltage to the second wire, the second voltage being different than the first voltage.