US 12,411,424 B2
Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object
Remco Van De Meerendonk, 's-Hertogenbosch (NL); Daniel Jozef Maria Direcks, Simpelveld (NL); Güneş Nakiboǧlu, Eindhoven (NL); Nicholas Peter Waterson, Veldhoven (NL); Joost André Klugkist, Waalre (NL); Sven Pekelder, Breugel (NL); Antonius Johannus Van Der Net, Tilburg (NL); Johannes Henricus Wilhelmus Jacobs, Heeze (NL); Jaap Oudes, Eindhoven (NL); Gerardus Arnoldus Hendricus Franciscus Janssen, Eindhoven (NL); Jeroen Peterus Johannes Van Lipzig, Beesel (NL); and Johannes Franciscus Martinus Van Santvoort, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 18/284,608
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Mar. 22, 2022, PCT No. PCT/EP2022/057476
§ 371(c)(1), (2) Date Sep. 28, 2023,
PCT Pub. No. WO2022/223220, PCT Pub. Date Oct. 27, 2022.
Claims priority of application No. 21169681 (EP), filed on Apr. 21, 2021; application No. 21178831 (EP), filed on Jun. 10, 2021; and application No. 21209310 (EP), filed on Nov. 19, 2021.
Prior Publication US 2024/0176255 A1, May 30, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70891 (2013.01) 20 Claims
OG exemplary drawing
 
1. A temperature conditioning system using conditioning liquid to condition a temperature of an object, the temperature conditioning system comprising:
a conditioning conduit to guide conditioning liquid through or along the object, the conditioning conduit comprising a conditioning conduit inlet and a conditioning conduit outlet,
a return conduit having a return conduit inlet and a return conduit outlet,
a supply chamber having a supply chamber inlet connected to the return conduit outlet and a supply chamber outlet connected to the conditioning conduit inlet, and
a discharge chamber having a discharge chamber inlet connected to the conditioning conduit outlet and a discharge chamber outlet connected to the return conduit inlet,
wherein a first pressure in the supply chamber and a second pressure in the discharge chamber are held at a sub-atmospheric pressure level, and
wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit.