| CPC G03F 7/70875 (2013.01) [G03F 7/30 (2013.01)] | 9 Claims |
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1. A developing device, characterized in comprising:
a development chamber, provided with an air extraction pipeline for extracting air inside the development chamber to outside the development chamber;
a carrier, disposed in the development chamber, for supporting a wafer;
a plurality of temperature sensors, disposed on the carrier, for detecting temperatures of a plurality of target regions;
a plurality of mutually independent air supply pipelines, for supplying air to the development chamber, each air supply pipeline having a nozzle towards the carrier, each of the target regions corresponding to at least one air supply pipeline; and
a control unit, for acquiring measured temperatures of the temperature sensors and basing on the measured temperatures to calculate current temperatures of the corresponding target regions, and basing on the current temperatures of the target regions to adjust air parameters of the corresponding air supply pipelines, so that the temperatures of the corresponding target regions rest within a preset temperature range;
wherein the carrier has a plurality of target regions in the shape of concentric rings, each target region in the shape of concentric ring is provided therein with a plurality of uniformly distributed temperature sensors, and the control unit is employed to acquire measured temperatures of the temperature sensors in the target region and calculate an average temperature of all temperature sensors in the target region to serve as the current temperature of the corresponding target region;
the developing device further comprising:
a turntable, disposed between the carrier and all nozzles, the turntable having a plurality of air-blowing regions in the shape of concentric rings, the air-blowing regions corresponding to the target regions on a one-by-one basis to blow air to corresponding target regions, each air-blowing region in the shape of concentric ring being opened with a plurality of uniformly distributed through-holes, above each air-blowing region in the shape of concentric ring being provided a plurality of uniformly distributed nozzles, the turntable being rotatable within a plane parallel to the carrier, and the through-holes allowing airflows of the nozzles to pass during rotation process.
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