US 12,411,418 B2
Freeform metrology information acquisition system
Shawn Small, Portland, OR (US)
Assigned to RUCKUS SPACE, LLC, Portland, OR (US)
Filed by Ruckus Space, LLC, Portland, OR (US)
Filed on Mar. 15, 2023, as Appl. No. 18/121,991.
Claims priority of provisional application 63/324,535, filed on Mar. 28, 2022.
Prior Publication US 2023/0305406 A1, Sep. 28, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/704 (2013.01) [G03F 7/705 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A freeform metrology information acquisition system, the system comprising:
a measurement probe configured to obtain metrology information for an object under inspection;
one or more cameras configured to image a scene including the measurement probe and the object under inspection; and
a computing device communicatively coupled to the measurement probe and the one or more cameras, the computing device comprising:
one or more processors configured to execute instructions stored in memory to:
receive the metrology information from the measurement probe;
receive from the one or more cameras a sequence of images of the scene including the measurement probe and the object under inspection;
track a position of the measurement probe in the scene based at least on the sequence of images;
spatially register the metrology information acquired by the measurement probe to tracked positions of the measurement probe in the scene;
track a position of the object in the scene based at least on the sequence of images; and
visually present, via a display, a visual representation of the object under inspection textured with a visual representation of at least some of the metrology information that has a tracked position in spatial alignment with the tracked position of the object under inspection.