US 12,411,417 B2
Projection objective including an optical device
Johannes Lippert, Buch am Wald (DE); Toralf Gruner, Aalen-Hofen (DE); Kerstin Hild, Waldstetten (DE); Hans Michael Stiepan, Aalen (DE); Thilo Pollak, Neresheim (DE); and Jeffrey Cavaco, Boylston, MA (US)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Jan. 12, 2023, as Appl. No. 18/153,640.
Application 18/153,640 is a continuation of application No. PCT/EP2021/070949, filed on Jul. 27, 2021.
Claims priority of provisional application 63/058,745, filed on Jul. 30, 2020.
Claims priority of application No. 102020131389.6 (DE), filed on Nov. 26, 2020.
Prior Publication US 2023/0142187 A1, May 11, 2023
Int. Cl. G03F 7/20 (2006.01); G02B 13/16 (2006.01); G02B 26/08 (2006.01); G03F 7/00 (2006.01); H10N 30/20 (2023.01); H10N 30/80 (2023.01)
CPC G03F 7/70266 (2013.01) [G02B 13/16 (2013.01); G02B 26/0825 (2013.01); G03F 7/70891 (2013.01); H10N 30/206 (2023.02); H10N 30/802 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a projection objective, comprising:
an optical device;
a controller; and
temperature sensors,
wherein:
the optical device comprises an optical element and an electrostrictive actuator;
the optical element comprises an optically effective surface;
the optical element is adjacent an intermediate image plane of the apparatus;
the controller is configured to provide a control voltage to the electrostrictive actuator to deform the electrostrictive actuator;
the electrostrictive actuator is connected to the optical element to influence a surface shape of the optically effective surface;
the temperature sensors are configured to measure: a) a temperature of the electrostrictive actuator; b) a temperature change of the electrostrictive actuator; c) a temperature distribution of the electrostrictive actuator; d) and/or a temperature distribution of surroundings of the electrostrictive actuator;
the temperature sensors are configured so that, at least at times when the electrostrictive actuator influences the optically effective surface of the optical element, the temperature sensors determine: a) the temperature of the electrostrictive actuator; b) the temperature change of the electrostrictive actuator; and/or c) a temperature of the surroundings the electrostrictive actuator, thereby taking account of a temperature-dependent influence when the electrostrictive actuator is driven by the control device; and
the apparatus is a projection exposure apparatus.