US 12,411,409 B2
Aromatic underlayer
Sheng Liu, Bow, NH (US); James F. Cameron, Brookline, MA (US); Shintaro Yamada, Shrewsbury, MA (US); Iou-Sheng Ke, Andover, MA (US); Keren Zhang, Kirkland, WA (US); Daniel Greene, Louisville, KY (US); Paul J. LaBeaume, Auburn, MA (US); Li Cui, Westborough, MA (US); and Suzanne M. Coley, Mansfield, MA (US)
Assigned to Rohm and Haas Electronic Materials LLC, Marlborough, MA (US)
Filed by Rohm and Haas Electronic Materials LLC, Marlborough, MA (US)
Filed on Apr. 30, 2021, as Appl. No. 17/245,326.
Application 17/245,326 is a continuation in part of application No. 16/598,264, filed on Oct. 10, 2019, granted, now 12,099,300.
Claims priority of provisional application 63/019,336, filed on May 2, 2020.
Claims priority of provisional application 62/754,752, filed on Nov. 2, 2018.
Prior Publication US 2021/0247695 A1, Aug. 12, 2021
Int. Cl. G03F 7/11 (2006.01); C09D 5/00 (2006.01); G03F 7/075 (2006.01)
CPC G03F 7/11 (2013.01) [C09D 5/006 (2013.01); G03F 7/0752 (2013.01)] 13 Claims
 
1. A method comprising: (a) providing an electronic device substrate; (b) coating a layer of a coating composition comprising one or more curable compounds on a surface of the electronic device substrate, wherein the one or more curable compounds comprise an aromatic core chosen from a C5-6 aromatic ring and a C9-30 fused aromatic ring system and three or more substituents of formula (1)

OG Complex Work Unit Chemistry
wherein at least two substituents of formula (1) are attached to the aromatic core; and wherein Ar1 is an aromatic ring or fused aromatic ring system having from 5 to 30 carbons; Z is a substituent chosen from OR1, protected hydroxyl, carboxyl, protected carboxyl, SR1, protected thiol, —O—C(═O)—C1-6-alkyl, halogen, and NHR2; each R1 is chosen from H, C1-10 alkyl, C2-10 unsaturated hydrocarbyl, and C5-30 aryl; each R2 is chosen from H, C1-10 alkyl, C2-10 unsaturated hydrocarbyl, C5-30 aryl, C(═O)—R1, and S(═O)2—R1; x is an integer from 1 to 4; and * denotes the point of attachment to the aromatic core; wherein Ar1 is not further substituted beyond the Z substituent(s) and the alkyne-containing substituent; provided that no substituents of formula (1) are in an ortho position to each other on the same ring of the aromatic core; (c) curing the layer of the curable compound to form an underlayer; (d) coating a layer of a photoresist on the underlayer; (e) exposing the photoresist layer to actinic radiation through a mask; (f) developing the exposed photoresist layer to form a resist pattern; and (g) transferring the pattern to the underlayer to expose portions of the electronic device substrate.