US 12,411,083 B2
Measuring apparatus, measuring method, and storage medium
Takahiro Masumura, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 5, 2023, as Appl. No. 18/295,891.
Application 18/295,891 is a continuation of application No. PCT/JP2021/027930, filed on Jul. 28, 2021.
Claims priority of application No. 2020-173529 (JP), filed on Oct. 14, 2020.
Prior Publication US 2023/0236126 A1, Jul. 27, 2023
Int. Cl. G01N 21/49 (2006.01)
CPC G01N 21/49 (2013.01) 11 Claims
OG exemplary drawing
 
1. A measuring apparatus configured to acquire information on a target, the measuring apparatus comprising:
an irradiating unit configured to irradiate a specific area of the target with irradiation light;
a detecting unit configured to receive exit light from the target which is caused by irradiating the specific area with the irradiation light; and
a processing unit configured to process a signal output from the detecting unit,
wherein the processing unit causes the irradiating unit to shape a wavefront of the irradiation light by feeding back a first signal output from the detecting unit that has received the exit light, and
wherein the processing unit acquires information about the specific area using a second signal output from the detecting unit that has received exit light from the target which is caused by irradiating the specific area with irradiation light having the shaped wavefront,
wherein the processing unit monitors changes in the information on the target by comparing the second signal measured for a first area and the second signal measured for a second area, and the first area and the second area are two different specific areas, and
wherein the processing unit uses the second signal for the first area as reference data, and monitors a change in the second signal for the second area relative to the reference data.