US 12,411,000 B2
Strain gauge
Atsushi Kitamura, Nagano (JP); Toshiaki Asakawa, Nagano (JP); Aya Ono, Nagano (JP); and Akiyo Yuguchi, Nagano (JP)
Assigned to MINEBEA MITSUMI Inc., Nagano (JP)
Appl. No. 17/907,567
Filed by MINEBEA MITSUMI Inc., Nagano (JP)
PCT Filed Mar. 26, 2021, PCT No. PCT/JP2021/012986
§ 371(c)(1), (2) Date Sep. 28, 2022,
PCT Pub. No. WO2021/200693, PCT Pub. Date Oct. 7, 2021.
Claims priority of application No. 2020-060534 (JP), filed on Mar. 30, 2020.
Prior Publication US 2023/0147031 A1, May 11, 2023
Int. Cl. G01B 7/16 (2006.01); G01L 1/22 (2006.01)
CPC G01B 7/20 (2013.01) [G01L 1/225 (2013.01); G01L 1/2293 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A strain gauge comprising:
a flexible resin substrate; and
a resistor formed of a film that includes a composite film of Cr, CrN, and Cr2N, the resistor being situated on or above the substrate,
wherein a film thickness of the resistor is greater than or equal to 100 nm and less than or equal to 700 nm, and each of a creep amount and a creep recovery amount of a weighing instrument including the strain gauge is within ±0.0735% when measured with the weighing instrument according to International Organization of Legal Metrology (OIML) R60.