US 12,410,519 B2
Automated showerhead tilt adjustment
Sam Jafarian Tehrani, King City, OR (US); Bryan Anthony Cmelak, Tigard, OR (US); Jacob Lee Hiester, Newberg, OR (US); Bin Luo, Beaverton, OR (US); and John Wiltse, Lake Oswego, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 18/012,224
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Jun. 10, 2021, PCT No. PCT/US2021/036808
§ 371(c)(1), (2) Date Dec. 21, 2022,
PCT Pub. No. WO2021/262446, PCT Pub. Date Dec. 30, 2021.
Claims priority of provisional application 63/042,980, filed on Jun. 23, 2020.
Prior Publication US 2023/0272533 A1, Aug. 31, 2023
Int. Cl. C23C 16/52 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/45587 (2013.01) [C23C 16/45565 (2013.01); C23C 16/52 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An automated tilting system for adjusting an orientation of a component in a substrate processing chamber, the automated tilting system comprising:
at least one tilt adjustment motor arranged to cooperate with the component;
the at least one tilt adjustment motor connected directly or indirectly to a connected portion of the component by a coupling, the coupling configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component thereby to adjust the orientation of the component in the processing chamber, wherein the coupling comprises:
a plunge interface that allows axial movement of a driven member relative to a drive member while transmitting rotational motion between the drive member and the driven member,
wherein the driven member is configured to move axially independent of the at least one tilt adjustment motor to decouple axial loads from the at least one tilt adjustment motor, and wherein the component is a showerhead component or a cooling plate component.