US 12,410,515 B2
Contaminant trap system for a reactor system
Ankit Kimtee, Phoenix, AZ (US); and Rohan Rane, Tempe, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Jan. 27, 2021, as Appl. No. 17/159,488.
Claims priority of provisional application 62/967,320, filed on Jan. 29, 2020.
Prior Publication US 2021/0230744 A1, Jul. 29, 2021
Int. Cl. C23C 16/44 (2006.01); B01D 46/00 (2022.01); B01D 46/10 (2006.01); B01D 46/62 (2022.01)
CPC C23C 16/4402 (2013.01) [B01D 46/10 (2013.01); B01D 46/62 (2022.01); B01D 2221/14 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A contaminant trap system of a reactor system, comprising:
a trap housing comprising a housing outer wall;
a plurality of baffle plates disposed in the trap housing, wherein each baffle plate comprises a design comprising:
a first plurality of apertures spanning through a baffle plate body between a top baffle plate surface and a bottom baffle plate surface; and
a solid body portion,
wherein the design for each baffle plate is the same;
a plurality of complementary baffle plates disposed in the trap housing between a first end and a second end of the trap housing, wherein each complementary baffle plate comprises a complementary design comprising:
a first plurality of complementary apertures spanning through a complementary baffle plate body between a top complementary baffle plate surface and a bottom complementary baffle plate surface; and
a complementary solid body portion,
wherein the complementary design for each complementary baffle plate is the same, and wherein the complementary design is different than the design for each baffle plate,
wherein the plurality of baffle plates and the plurality of complementary baffle plates are comprised in a baffle plate stack and disposed in a baffle plate order between a first end and a second end of the baffle plate stack in which the plurality of baffle plates alternates with the plurality of complementary baffle plates such that no two baffle plates from the plurality of baffle plates and no two complementary baffle plates from the plurality of complementary baffle plates are adjacent in the baffle plate order,
wherein a first baffle plate and a second baffle plate, from the plurality of baffle plates, and a first complementary baffle plate, from the plurality of complementary baffle plates, are disposed in the baffle plate order in the trap housing such that the first baffle plate is adjacent to the first complementary baffle plate and the second baffle plate is adjacent to the first complementary baffle plate, and
wherein the first baffle plate and the first complementary baffle plate are disposed in a baffle plate orientation such that at least a portion of a first aperture of the first baffle plate and at least a portion of the complementary solid body portion of the first complementary baffle plate are aligned along a first axis spanning between the first end and the second end of the trap housing, and such that at least a portion of the solid body portion of the first baffle plate and the second baffle plate, and at least a portion of a complementary aperture of the first plurality of complementary apertures of the first complementary baffle plate, are aligned along a second axis spanning between the first end and the second end of the trap housing,
wherein the first plurality of apertures of each baffle plate is disposed on a radially inward portion of each baffle plate, and wherein the solid body portion is disposed on a radially outward portion of each baffle plate, wherein the radially outward portion of each baffle plate does not comprise an aperture, and wherein the first plurality of complementary apertures of each complementary baffle plate is disposed on a radially outward portion of each complementary baffle plate, and wherein the complementary solid body portion is disposed on a radially inward portion of each complementary baffle plate, wherein the radially inward portion of each complementary baffle plate does not comprise a complementary aperture.