US 12,410,514 B2
Vapor deposition source material used in production of film containing indium and one or more of the other metals, and the method of producing film containing indium and one or more of the other metals
Nobutaka Takahashi, Sakado (JP); Fumikazu Mizutani, Sakado (JP); and Shintaro Higashi, Sakado (JP)
Assigned to KOJUNDO CHEMICAL LABORATORY CO., LTD., Sakado (JP)
Appl. No. 18/254,687
Filed by KOJUNDO CHEMICAL LABORATORY CO., LTD., Sakado (JP)
PCT Filed Nov. 26, 2021, PCT No. PCT/JP2021/043311
§ 371(c)(1), (2) Date May 26, 2023,
PCT Pub. No. WO2022/118744, PCT Pub. Date Jun. 9, 2022.
Claims priority of application No. 2020-201422 (JP), filed on Dec. 4, 2020; and application No. 2021-189893 (JP), filed on Nov. 24, 2021.
Prior Publication US 2024/0003004 A1, Jan. 4, 2024
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/407 (2013.01) [C23C 16/45553 (2013.01)] 3 Claims
 
1. A chemical vapor deposition source material used in production of a film containing indium and one or more of the other metals, comprising:
a compound represented by the following general formula (1) or (2),
one or more compounds represented by the following general formulae (3) to (6), and
a solvent,
wherein the chemical vapor deposition source material comprises not less than 0.1 mol of the one or more compounds represented by the following general formulae (3) to (6) on the 100 mol basis of the compound represented by the following general formula (1) or (2), and
wherein the total concentration of the compound represented by the general formula (1) or (2), and the one or more of the compounds represented by the general formulae (3) to (6) is 0.01 wt % or more:
In(C5H4R)  (1)
In(C5(CH3)4R)  (2)
M1(C5H4R)  (3)
M2(C5H4R)n  (4)
M1(C5(CH3)4R)  (5)
M2(C5(CH3)4R)n  (6)
in the general formulae (1) to (6), each R is independently a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, in the general formulae (3) and (5), M1 is a metal excluding indium, in the general formulae (4) and (6), M2 is a metal excluding indium, and n is an integer of 2 to 4.