US 12,410,510 B2
Coating plant for coating a planar object and a method for coating a planar object
Christian Schwerdt, Duisburg (DE); and Andre Samusch, Dortmund (DE)
Assigned to THYSSENKRUPP STEEL EUROPE AG, Duisburg (DE)
Appl. No. 18/569,325
Filed by THYSSENKRUPP STEEL EUROPE AG, Duisburg (DE)
PCT Filed May 30, 2022, PCT No. PCT/EP2022/064537
§ 371(c)(1), (2) Date Dec. 12, 2023,
PCT Pub. No. WO2023/280464, PCT Pub. Date Jan. 12, 2023.
Claims priority of application No. 10 2021 117 574.7 (DE), filed on Jul. 7, 2021.
Prior Publication US 2024/0271268 A1, Aug. 15, 2024
Int. Cl. C23C 14/20 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01)
CPC C23C 14/24 (2013.01) [C23C 14/562 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A coating plant for coating a planar object with a material in the gas phase, wherein the coating plant comprises:
a vacuum chamber for feeding through the planar object to be coated,
a device for the vapor deposition of the material, having an evaporation portion for evaporating the material into the gas phase, and a nozzle portion coupled to the evaporation portion, wherein the nozzle portion has a nozzle which is arranged within the vacuum chamber and has a nozzle outlet for directing and discharging the material present in the gas phase from the nozzle outlet toward a surface to be coated of the planar object passed through the vacuum chamber in order to coat said object continuously with material that acts and condenses on the surface,
wherein the nozzle is rotatably mounted in order to change the orientation of the nozzle outlet relative to the surface to be coated and the nozzle has a cylindrical external mold section which is toothed in a peripheral portion of its circumference or over its entire circumference with teeth, the teeth being in engagement with a drivable counter element engaging in the teeth in order to rotate the nozzle by driving the counter element.