US 12,410,507 B2
Mask group, method of manufacturing organic device and organic device
Yusuke Nakamura, Tokyo (JP); Isao Miyatani, Tokyo (JP); Naoki Nishimura, Tokyo (JP); and Hiroshi Yano, Tokyo (JP)
Assigned to Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed by Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed on Jun. 13, 2022, as Appl. No. 17/806,531.
Claims priority of application No. 2021-098994 (JP), filed on Jun. 14, 2021; and application No. 2022-037594 (JP), filed on Mar. 10, 2022.
Prior Publication US 2022/0399503 A1, Dec. 15, 2022
Int. Cl. C23C 14/04 (2006.01); H10K 50/82 (2023.01); H10K 59/121 (2023.01); H10K 59/65 (2023.01); H10K 59/80 (2023.01); H10K 71/00 (2023.01)
CPC C23C 14/042 (2013.01) [H10K 50/82 (2023.02); H10K 59/121 (2023.02); H10K 59/65 (2023.02); H10K 59/80521 (2023.02); H10K 71/00 (2023.02); H10K 71/621 (2023.02)] 5 Claims
OG exemplary drawing
 
1. A mask group comprising:
two or more masks,
wherein each of the two or more masks includes a shield region and a through-hole,
wherein a mask multilayer body in which the two or more masks are stacked has a penetration region that overlaps the through-hole when viewed in a normal direction of a mask of the two or more masks,
wherein the mask multilayer body has a first mask region that contains the penetration region that has a first aperture ratio and a second mask region that contains the penetration region that has a second aperture ratio lower than the first aperture ratio when viewed in the normal direction of the mask,
wherein each mask of the two or more masks has a first surface and a second surface that is located opposite the first surface,
wherein the through-hole includes a first recessed portion that is located at the first surface, a second recessed portion that is located at the second surface, and a connection portion at which the first recessed portion and the second recessed portion are connected to each other,
wherein when a section in the normal direction is viewed, a region-defining straight line is defined as a straight line that passes through the connection portion and that forms an angle θ together with the first surface, the region-defining straight line intersects the first surface at a first intersection point, an effective region is defined as a region inside the first intersection point in the through-hole, and a peripheral region is defined as a region outside the first intersection point in the through-hole,
wherein the angle θ is 35° or more and 70° or less,
wherein the penetration region in the second mask region includes a hole overlapping region in which through-holes of two masks of the two or more masks overlap,
wherein the hole overlapping region includes a first hole overlapping region in which the peripheral regions of the through-holes of the two masks that are included in the mask multilayer body overlap, and
wherein effective regions of the through-holes forming the first hole overlapping region do not overlap.