US 12,410,505 B2
Coating film, tool, and machine tool
Takuma Kato, Shiga (JP)
Assigned to NIDEC MACHINE TOOL CORPORATION, Shiga (JP)
Filed by NIDEC MACHINE TOOL CORPORATION, Shiga (JP)
Filed on Mar. 1, 2023, as Appl. No. 18/177,089.
Claims priority of application No. 2022-031561 (JP), filed on Mar. 2, 2022.
Prior Publication US 2023/0279535 A1, Sep. 7, 2023
Int. Cl. C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 14/50 (2006.01); B23F 21/10 (2006.01); B23F 21/16 (2006.01)
CPC C23C 14/024 (2013.01) [C23C 14/0635 (2013.01); C23C 14/0641 (2013.01); C23C 14/0664 (2013.01); C23C 14/08 (2013.01); C23C 14/505 (2013.01); B23F 21/10 (2013.01); B23F 21/16 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A coating film, comprising a lamination unit including a first layer and at least one of a second layer and a third layer, wherein
the first layer contains a nitride, a carbide, a carbonitride, or an oxide of a first material of which elemental composition is represented by (Cr1-a-b-cAla[Ni1-dZrd]bXc),
as features of the first layer,
the [Ni1-dZrd] is a ZrNi compound,
the X is at least one element selected from Ti, Nb, Si, B, W, and V,
the a, b, and c respectively represent atomic concentrations of Al, [NiZr], and X in the (Cr1-a-b-cAla[Ni1-dZrd]bXc), and satisfy 0.5≤a≤0.8, 0.01≤b≤0.35, and 0<c≤0.2,
the d represents an atomic concentration of Zr in the [Ni1-dZrd], and satisfies 0.2≤d≤0.5,
the second layer contains a nitride, a carbide, a carbonitride, or an oxide of a second material of which elemental composition is represented by (AleCr1-e-fZf),
the Z is at least one element selected from Si, Y, and B,
the e and f represent atom concentrations of Al and Z in the (AleCr1-e-fZf), respectively, and satisfy 0.5≤e≤0.8, 0.03≤f≤0.3, e+f≤0.9,
the third layer contains a nitride, a carbide, a carbonitride, or an oxide of a third material of which elemental composition is represented by (AlgCr1-g), and
the g represents an atomic concentration of Al in the (AlgCr1-g), and satisfies 0.5≤g≤0.8.