US 12,409,656 B2
Method for manufacturing element substrate, element substrate, and liquid ejection head
Tetsushi Ishikawa, Tokyo (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Mar. 15, 2023, as Appl. No. 18/184,076.
Claims priority of application No. 2022-055449 (JP), filed on Mar. 30, 2022.
Prior Publication US 2023/0311493 A1, Oct. 5, 2023
Int. Cl. B41J 2/16 (2006.01); B41J 2/045 (2006.01); B41J 2/165 (2006.01); B41J 2/175 (2006.01); B41J 2/25 (2006.01); G03F 1/48 (2012.01); G03F 1/50 (2012.01); G03F 1/82 (2012.01)
CPC B41J 2/1621 (2013.01) [B41J 2/04586 (2013.01); B41J 2/1607 (2013.01); B41J 2/162 (2013.01); B41J 2/16502 (2024.05); B41J 2/17503 (2013.01); B41J 2/25 (2013.01); G03F 1/48 (2013.01); G03F 1/50 (2013.01); G03F 1/82 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method for manufacturing an element substrate for use in a liquid ejection head for ejecting a liquid to a recording medium, the element substrate comprising:
a substrate having a nozzle including an ejection port opposed to the recording medium, and a pressure generating chamber communicating with the nozzle, and subjected to a liquid repellent treatment on a part of an ejection port surface including the ejection port formed therein; and
a generating element for generating an energy for ejecting the liquid in the pressure generating chamber from the ejection port,
the method comprising:
a liquid repellent treatment step of performing the liquid repellent treatment on the substrate; and
a liquid repellent region removing step of removing a part of a liquid repellent region which is subjected to the liquid repellent treatment such that a non-liquid repellent region which is not subjected to the liquid repellent treatment is exposed at a surface of the substrate opposed to the recording medium,
wherein the substrate has a protruded portion protruding from the ejection port surface toward a recording medium side, and
wherein the liquid repellent region removing step removes a top of the protruded portion subjected to the liquid repellent treatment by grinding.