US 12,409,466 B2
Method and system for switching a dispensed fluid in a nanofabrication dispensing system
Tyler Pearce Mann, Reading, PA (US); and Steven C. Shackleton, Austin, TX (US)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Dec. 12, 2022, as Appl. No. 18/064,798.
Prior Publication US 2024/0189849 A1, Jun. 13, 2024
Int. Cl. B05B 12/14 (2006.01); B08B 9/032 (2006.01); B82Y 40/00 (2011.01)
CPC B05B 12/14 (2013.01) [B08B 9/0321 (2013.01); B82Y 40/00 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of switching a first fluid supplied to a dispenser with a second fluid, the method comprising:
stopping the first fluid from flowing into a common portion of a flow system, the common portion including:
a supply manifold;
the dispenser;
a return manifold;
a supply path providing fluid communication between the supply manifold and the dispenser; and
a return path providing fluid communication between the dispenser and the return manifold,
causing a flush fluid to flow through the common portion of the flow system;
stopping the flush fluid from flowing into the common portion of the flow system;
removing the flush fluid from the common portion of the flow system;
causing the second fluid to flow through the common portion of the flow system; and
continuously circulating the first fluid to and from a reservoir without the first fluid entering the common portion of the flow system,
wherein the continuously circulating of the first fluid begins a) after stopping the first fluid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system.