US 12,082,505 B2
Integrated heater (and related method) to recover degraded piezoelectric device performance
Alexander Kalnitsky, San Francisco, CA (US); Chun-Ren Cheng, Hsin-Chu (TW); Chi-Yuan Shih, Hsinchu (TW); Kai-Fung Chang, Taipei (TW); Shih-Fen Huang, Jhubei (TW); Yi-Chuan Teng, Zhubei (TW); Yi Heng Tsai, Hsinchu (TW); You-Ru Lin, New Taipei (TW); and Yan-Jie Liao, Hsin-Chu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu (TW)
Filed on Aug. 5, 2022, as Appl. No. 17/881,934.
Application 17/881,934 is a division of application No. 16/413,839, filed on May 16, 2019, granted, now 11,730,058.
Claims priority of provisional application 62/734,090, filed on Sep. 20, 2018.
Prior Publication US 2022/0384709 A1, Dec. 1, 2022
Int. Cl. H10N 30/04 (2023.01); G01N 25/58 (2006.01); H10N 30/00 (2023.01); H10N 30/067 (2023.01); H10N 30/87 (2023.01); H10N 30/063 (2023.01)
CPC H10N 30/10513 (2023.02) [G01N 25/58 (2013.01); H10N 30/04 (2023.02); H10N 30/067 (2023.02); H10N 30/877 (2023.02); H10N 30/063 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A method for recovering degraded device performance of a piezoelectric device, the method comprising:
operating the piezoelectric device in an actuation mode a first time, the piezoelectric device comprising a piezoelectric structure disposed over a semiconductor substrate;
measuring an electrical property of the piezoelectric device, and based on the measurement determining the electrical property of the piezoelectric device has degraded from a first value to a second value;
in response to the determination, performing a recovery mode operation on the piezoelectric device, the recovery mode operation comprising heating the piezoelectric structure to a recovery temperature; and
operating the piezoelectric device in the actuation mode a second time after the recovery mode operation has been performed, wherein when operating the piezoelectric device in the actuation mode the second time, the electrical property of the piezoelectric device has a third value that is closer to the first value than the second value is to the first value.