| CPC H10N 10/82 (2023.02) [H10N 10/01 (2023.02)] | 2 Claims |
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1. A manufacturing method for a thermoelectric conversion element, the manufacturing method comprising:
forming a plurality of thermoelectric conversion layers on a substrate;
forming an insulating layer on the plurality of thermoelectric conversion layers;
forming, on the insulating layer, a plurality of first contact holes that corresponds to each of the thermoelectric conversion layers and that exposes a main surface of each of the thermoelectric conversion layers;
forming, on the insulating layer, a first layer of each of a plurality of first electrodes that corresponds to each of the thermoelectric conversion layers and connects to the main surface of each of the thermoelectric conversion layers via the first contact holes;
forming, on the insulating layer on which the first layer of each of the first electrodes is formed, a plurality of second contact holes that corresponds to each of the thermoelectric conversion layers and exposes the main surface of each of the thermoelectric conversion layers; and
forming a plurality of thermoelectric conversion cells by forming, on the insulating layer, both a plurality of second electrodes, that corresponds to each of the thermoelectric conversion layers and connects to the main surface of each of the thermoelectric conversion layers via the second contact holes, and a second layer of the plurality of first electrodes that covers the first layer of each of the first electrodes from a material having a work function that is different from a work function of a material forming the first layer of each of the first electrodes, each of thermoelectric conversion cells including the thermoelectric conversion layer, the insulating layer, the first electrode, and the second electrode,
wherein
in the forming of the plurality of thermoelectric conversion cells,
the second layer of each of the first electrodes is formed in a state in which the first layer of each of the first electrodes is not exposed from the second layer of each of the first electrodes, and
in the thermoelectric conversion cells that are adjacent to each other, the second layer of the first electrode of one of the thermoelectric conversion cells and the second electrode of another of the thermoelectric conversion cells are formed integrally, the first electrode and the second electrode are connected one-to-one, and the plurality of thermoelectric conversion cells is connected in series.
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