US 12,082,423 B2
Semiconductor device including blocking pattern, electronic system, and method of forming the same
Hyunmook Choi, Suwon-si (KR); Jooheon Kang, Seoul (KR); Sanghoon Kim, Hwaseong-si (KR); and Jihong Kim, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Feb. 24, 2022, as Appl. No. 17/679,863.
Claims priority of application No. 10-2021-0120905 (KR), filed on Sep. 10, 2021.
Prior Publication US 2023/0077589 A1, Mar. 16, 2023
Int. Cl. H10B 63/00 (2023.01)
CPC H10B 63/34 (2023.02) 20 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a horizontal wiring layer on a substrate;
a stack structure disposed on the horizontal wiring layer, the stack structure comprising a plurality of insulating layers and a plurality of electrode layers alternately stacked on each other; and
a pillar structure extending into the horizontal wiring layer and extending through the stack structure,
wherein the plurality of electrode layers comprise
one or a plurality of selection lines adjacent to an uppermost end of the stack structure, and
a plurality of word lines surrounding the stack structure below the one or plurality of selection lines,
wherein the pillar structure comprises
a variable resistive layer,
a channel layer between the variable resistive layer and the stack structure,
a gate dielectric layer between the channel layer and the stack structure, and
a blocking pattern disposed between the variable resistive layer and the channel layer and being adjacent to a first selection line among the one or plurality of selection lines, wherein the channel layer is disposed between the first selection line and the blocking pattern.