US 12,082,331 B2
Inductively coupled plasma reactor and wire structure for antenna coil of inductively coupled plasma reactor
Jin Ho Bae, Hwaseong-si (KR); Min Jae Kim, Ansan-si (KR); and Geon Bo Sim, Osan-si (KR)
Assigned to LOT CES CO., LTD., Osan-si (KR); and LOT VACUUM CO., LTD., Osan-si (KR)
Appl. No. 17/918,101
Filed by LOT CES CO., LTD., Osan-si (KR); and LOT VACUUM CO., LTD., Osan-si (KR)
PCT Filed Apr. 21, 2021, PCT No. PCT/KR2021/005042
§ 371(c)(1), (2) Date Oct. 10, 2022,
PCT Pub. No. WO2021/230518, PCT Pub. Date Nov. 18, 2021.
Claims priority of application No. 10-2020-0058634 (KR), filed on May 15, 2020.
Prior Publication US 2023/0136312 A1, May 4, 2023
Int. Cl. H05H 1/46 (2006.01); H01J 37/32 (2006.01); H01Q 1/26 (2006.01); H05H 1/02 (2006.01)
CPC H05H 1/4652 (2021.05) [H01J 37/3211 (2013.01); H01Q 1/26 (2013.01); H05H 1/02 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An inductively coupled plasma reactor comprising:
a reaction chamber configured to provide a plasma reaction space;
a ferrite core arranged to surround the plasma reaction space; and
an antenna coil formed by winding a wire structure on the ferrite core,
wherein the wire structure comprises a plurality of electrically conductive wires arranged in parallel and a strip-shaped covering made of a flexible material and configured to surround the plurality of electrically conductive wires.
 
4. A wire structure for an antenna coil of an inductively coupled plasma reactor so as to form the antenna coil by winding the antenna coil on a ferrite core in the inductively coupled plasma reactor including a reaction chamber configured to provide a plasma reaction space and a ferrite core arranged to surround the plasma reaction space, the wire structure comprising:
a plurality of electrically conductive wires arranged in parallel; and
a strip-shaped covering made of a flexible material and configured to surround the plurality of electrically conductive wires.