US 12,082,313 B2
Heater assembly and bonding head including same
Soon Hyun Kim, Incheon (KR); Byung Geun Kim, Cheonan-si (KR); and Byoung Chan Lee, Seoul (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Nov. 21, 2021, as Appl. No. 17/531,798.
Claims priority of application No. 10-2020-0164525 (KR), filed on Nov. 30, 2020.
Prior Publication US 2022/0174786 A1, Jun. 2, 2022
Int. Cl. H01L 21/67 (2006.01); F28D 21/00 (2006.01); H01L 21/683 (2006.01); H05B 1/02 (2006.01); H05B 3/06 (2006.01)
CPC H05B 1/0233 (2013.01) [F28D 21/0015 (2013.01); H01L 21/67144 (2013.01); H05B 3/06 (2013.01); H01L 21/6838 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A heater assembly comprising:
a housing having an accommodation space therein and having a cooling gas inlet communicating with the accommodation space;
a heater coupled to the housing; and
a porous block disposed in the accommodation space,
wherein the heater has a plurality of heat generation regions configured to have different temperatures from each other, and
wherein the porous block is configured to pass a cooling gas received from the cooling gas inlet and supply a plurality of cooling gas flows of the cooling gas to the plurality of heat generation regions, respectively.