US 12,081,941 B2
Acoustic devices with feedback control of acoustic resistance
Siarhei Dmitrievich Barsukou, Takarazuka (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on May 18, 2022, as Appl. No. 17/664,013.
Claims priority of provisional application 63/202,608, filed on Jun. 17, 2021.
Claims priority of provisional application 63/202,611, filed on Jun. 17, 2021.
Prior Publication US 2022/0408185 A1, Dec. 22, 2022
Int. Cl. H04R 17/02 (2006.01); B81B 3/00 (2006.01); H03H 9/02 (2006.01); H03H 9/125 (2006.01); H03H 9/17 (2006.01); H04R 3/02 (2006.01); H04R 3/06 (2006.01); H04R 17/10 (2006.01); H04R 31/00 (2006.01)
CPC H04R 17/02 (2013.01) [B81B 3/0021 (2013.01); H04R 3/02 (2013.01); B81B 2201/0257 (2013.01); H03H 9/02244 (2013.01); H03H 9/125 (2013.01); H03H 9/17 (2013.01); H04R 3/06 (2013.01); H04R 17/10 (2013.01); H04R 31/00 (2013.01); H04R 2201/003 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A piezoelectric microelectromechanical systems microphone, comprising:
a substrate;
one or more piezoelectric sensors movably coupled to the substrate, each of the piezoelectric sensors spaced apart from an adjacent piezoelectric sensor by a gap and including a multilayer cantilever beam extending from a proximal portion attached to the substrate to a distal tip at a free end of the cantilever beam, the cantilever beam having two piezoelectric layers and three metal electrode layers, at least a portion of a first piezoelectric layer interposed between a first metal electrode layer and a second metal electrode layer and at least a portion of a second piezoelectric layer interposed between the second metal electrode layer and a third metal electrode layer; and
a feedback control circuit electrically connected to the three metal electrode layers, the feedback control circuit configured to receive an output signal from the one or more piezoelectric sensors and configured to apply a direct current bias voltage across the first piezoelectric layer and across the second piezoelectric layer via the three metal electrode layers of the one or more piezoelectric sensors to actively control an acoustic resistance of the one or more piezoelectric sensors, the feedback control circuit controlling the acoustic resistance of the one or more piezoelectric sensors based on external acoustic sound pressure.