US 12,081,192 B2
Methods and devices for microelectromechanical resonators
Vamsy P. Chodavarapu, Brossard (CA); and George Xereas, Montreal (CA)
Assigned to Stathera IP Holdings, Inc., Montreal (CA)
Filed by Stathera IP Holdings Inc., Montreal (CA)
Filed on May 26, 2023, as Appl. No. 18/324,902.
Application 18/324,902 is a continuation of application No. 16/948,328, filed on Sep. 14, 2020, granted, now 11,664,781.
Application 16/948,328 is a continuation in part of application No. 16/369,757, filed on Mar. 29, 2019, granted, now 11,479,460, issued on Oct. 25, 2022.
Application 16/369,757 is a continuation of application No. 14/790,220, filed on Jul. 2, 2015, granted, now 10,291,200, issued on May 14, 2019.
Claims priority of provisional application 62/020,049, filed on Jul. 2, 2014.
Prior Publication US 2023/0308076 A1, Sep. 28, 2023
Int. Cl. H03H 9/10 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01); G01L 9/12 (2006.01); H03H 3/007 (2006.01); H03H 9/05 (2006.01); H03H 9/24 (2006.01)
CPC H03H 9/1057 (2013.01) [B81B 7/007 (2013.01); B81C 1/00182 (2013.01); B81C 1/00269 (2013.01); B81C 1/00301 (2013.01); G01L 9/0042 (2013.01); G01L 9/0073 (2013.01); G01L 9/12 (2013.01); H03H 3/0072 (2013.01); H03H 3/0073 (2013.01); H03H 9/0561 (2013.01); H03H 9/2405 (2013.01); H03H 9/2426 (2013.01); H03H 9/2431 (2013.01); H03H 9/2436 (2013.01); B81B 2203/0307 (2013.01); H03H 2009/2442 (2013.01); H03H 9/2452 (2013.01); H03H 9/2463 (2013.01); H03H 9/2473 (2013.01); H03H 9/2478 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A MEMS device comprising:
a lower cavity formed within a first layer of the MEMS device, wherein the lower cavity includes a first island;
an upper cavity formed within a second layer of the MEMS device, wherein the upper cavity includes a second island;
a MEMS resonating element arranged in a device layer of the MEMS device and anchored via the first island and the second island;
a first set of electrodes for electrostatic actuation and sensing of the MEMS resonating element in an in-plane mode, wherein the first set of electrodes is arranged in the device layer of the MEMS device; and
a second set of electrodes for electrostatic actuation and sensing of the MEMS resonating element in an out-of-plane mode, wherein the second set of electrodes is electrically isolated from the first set of electrodes, wherein the second set of electrodes is located in the second layer or the first layer of the MEMS device, and wherein the out-of-plane mode comprises one of a torsional mode or a saddle mode.