US 12,081,188 B2
Acoustic wave devices
Michio Kadota, Sendai (JP); Shuji Tanaka, Sendai (JP); and Yoshimi Ishii, Sendai (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by TOHOKU UNIVERSITY, Sendai (JP)
Filed on Oct. 15, 2019, as Appl. No. 16/653,964.
Claims priority of provisional application 62/746,512, filed on Oct. 16, 2018.
Prior Publication US 2020/0119710 A1, Apr. 16, 2020
Int. Cl. H03H 9/02 (2006.01); H03H 3/08 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/02551 (2013.01) [H03H 3/08 (2013.01); H03H 9/02574 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); H03H 9/64 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a quartz substrate including a first surface;
a piezoelectric plate formed from LiTaO3 or LiNbO3 and including a first surface configured to support a surface acoustic wave and a second surface in direct engagement with the first surface of the quartz substrate, the second surface being a minus surface resulting from crystal structure orientation of the piezoelectric plate; and
an interdigital transducer electrode formed on the first surface of the piezoelectric plate and configured to provide transducer functionality associated with the surface acoustic wave.