CPC H01S 5/04254 (2019.08) [H01S 5/04253 (2019.08); H01S 5/04256 (2019.08); H01S 5/18311 (2013.01); H01S 5/18361 (2013.01); H01S 5/423 (2013.01)] | 20 Claims |
1. A surface emitting laser device comprising:
a substrate;
a first reflective layer disposed on the substrate;
an active layer disposed on the first reflective layer,
an aperture layer disposed on the active layer and including an opening;
a second reflective layer disposed on the active layer;
a transparent electrode layer disposed on the second reflective layer; and
a metal electrode layer disposed on the transparent electrode layer,
wherein the transparent electrode layer includes a first region vertically overlapping the opening and a plurality of second regions extending from the first region,
wherein the plurality of second regions are spaced apart from each other on an outer side of the opening along a circumferential direction of the opening, and
wherein the metal electrode layer electrically contacts the second reflective layer between the plurality of second regions.
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