US 12,080,869 B2
Web edge metrology
David Masayuki Ishikawa, Mountain View, CA (US); Girish Kumar Gopalakrishnan Nair, San Jose, CA (US); Ezhiylmurugan Rangasamy, San Jose, CA (US); David Alvarez, San Jose, CA (US); and Kent Qiujing Zhao, San Francisco, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 6, 2021, as Appl. No. 17/543,360.
Claims priority of provisional application 63/123,878, filed on Dec. 10, 2020.
Prior Publication US 2022/0190306 A1, Jun. 16, 2022
Int. Cl. H01M 4/04 (2006.01); G01B 7/06 (2006.01); G01B 11/30 (2006.01); H01M 4/38 (2006.01); H01M 4/66 (2006.01); H01M 10/0525 (2010.01); G01N 21/84 (2006.01)
CPC H01M 4/0404 (2013.01) [G01B 7/105 (2013.01); G01B 11/303 (2013.01); H01M 4/0426 (2013.01); H01M 4/0471 (2013.01); H01M 4/382 (2013.01); H01M 4/661 (2013.01); H01M 10/0525 (2013.01); G01N 2021/8438 (2013.01); H01M 2220/20 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method, comprising:
transferring a continuous sheet of flexible material from a feed reel in an unwinding chamber to a deposition module arranged downstream from the unwinding chamber, the deposition module comprising a first coating drum capable of guiding the continuous sheet of flexible material past a plurality of deposition units;
guiding the continuous sheet of flexible material past the plurality of deposition units along a travel direction while depositing a lithium metal film on the continuous sheet of flexible material via the plurality of deposition units, wherein the chambers are radially disposed about the coating drum;
guiding the continuous sheet of flexible material past a metrology module, comprising a plurality of non-contact optical sensors positioned side-by-side along a transverse direction, wherein the optical sensors have a field of view coinciding with a travel path traversed by the continuous sheet of flexible material, and the transverse direction is perpendicular to the travel direction; and
obtaining a first contactless electrical resistivity measurement of the lithium metal film on the continuous sheet of flexible material in the field of view.