US 12,080,733 B2
Photodetector
Yuki Sugiura, Kyoto (JP); and Akito Inoue, Osaka (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Filed on Sep. 21, 2020, as Appl. No. 17/026,864.
Application 17/026,864 is a continuation of application No. PCT/JP2019/009959, filed on Mar. 12, 2019.
Claims priority of application No. 2018-060929 (JP), filed on Mar. 27, 2018.
Prior Publication US 2021/0005646 A1, Jan. 7, 2021
Int. Cl. H01L 27/146 (2006.01); H01L 31/107 (2006.01)
CPC H01L 27/1461 (2013.01) [H01L 27/14603 (2013.01); H01L 27/14643 (2013.01); H01L 31/107 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A photodetector, comprising:
a semiconductor substrate of a first conductivity type;
a first semiconductor layer of a second conductivity type that is located above the semiconductor substrate and forms a junction with the semiconductor substrate in a first area, the second conductivity type being different from the first conductivity type; and
a second semiconductor layer of the second conductivity type that is located above the semiconductor substrate in a second area outward of the first area, the second semiconductor layer having an impurity concentration lower than an impurity concentration of the first semiconductor layer, wherein
the semiconductor substrate includes a first junction portion,
the first semiconductor layer includes a second junction portion having a higher impurity concentration than a remaining portion of the first semiconductor layer, the second junction portion being joined to the first junction portion,
the second semiconductor layer extends to a level below an interface between the first junction portion-and the second junction portion-in a thickness direction of the semiconductor substrate, and
the second semiconductor layer is in contact with both the first junction portion and the second junction portion.