CPC H01L 25/0753 (2013.01) [F21V 9/08 (2013.01); G02B 26/04 (2013.01); G02F 1/167 (2013.01); G09G 3/22 (2013.01); G09G 3/32 (2013.01); H01L 23/4821 (2013.01); H01L 23/5381 (2013.01); H01L 25/167 (2013.01); H01L 27/156 (2013.01); H01L 33/36 (2013.01); H01L 33/38 (2013.01); H01L 33/385 (2013.01); H01L 33/48 (2013.01); H01L 33/50 (2013.01); H01L 33/502 (2013.01); H01L 33/508 (2013.01); H01L 33/58 (2013.01); H01L 33/60 (2013.01); H01L 33/62 (2013.01); H05K 1/0306 (2013.01); H05K 1/09 (2013.01); H05K 1/181 (2013.01); H05K 1/182 (2013.01); H05K 5/0017 (2013.01); F21Y 2105/10 (2016.08); F21Y 2113/13 (2016.08); F21Y 2115/10 (2016.08); G09G 2300/0452 (2013.01); G09G 2300/0842 (2013.01); G09G 2310/0264 (2013.01); H01L 33/20 (2013.01); H01L 33/405 (2013.01); H01L 2224/18 (2013.01); H01L 2224/73267 (2013.01); H01L 2224/92244 (2013.01); H05K 2201/0329 (2013.01); H05K 2201/10106 (2013.01); H05K 2201/10128 (2013.01); H05K 2201/10166 (2013.01)] | 27 Claims |
1. A method of forming a display, the method comprising:
depositing a first metal layer on and in direct contact with a surface of a display substrate;
patterning the first metal layer to form a first patterned metal layer;
depositing a layer of dielectric on and in direct contact with the first patterned metal layer to create an electrically insulating layer;
applying an uncured polymer layer on and in direct contact with the dielectric layer, the uncured polymer layer comprising a material different from the dielectric layer;
micro-transfer printing a plurality of light emitters from a native substrate onto and in direct contact with a surface of the uncured polymer layer, wherein the native substrate is native to at least a portion of the plurality of light emitters and the light emitters each have an anode and a cathode for providing power to the light emitters;
exposing the polymer to ultraviolet light to cure the polymer;
forming a plurality of vias through the cured polymer and dielectric layer to expose a portion of the first patterned metal layer;
depositing a second metal layer, wherein the second metal layer contacts an anode and a cathode of each light emitter of the plurality of light emitters; and
patterning the second metal layer to form the second patterned metal layer, wherein the second patterned metal layer comprises a plurality of anode interconnections and a plurality of cathode interconnections, each anode interconnection electrically connecting the anode of a corresponding light emitter of the plurality of light emitters to the first patterned metal layer through a corresponding via of the plurality of vias and each cathode interconnection electrically contacting the cathode of a corresponding light emitter of the plurality of light emitters.
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