| CPC H01L 21/6833 (2013.01) | 10 Claims |
|
1. A base plate having one surface and the other surface opposite to the one surface, an electrostatic chuck being capable of being mounted on the one surface, the base plate comprising:
a refrigerant flow path provided therein,
wherein an inner wall of the refrigerant flow path has an upper surface convex toward the one surface in a longitudinal sectional view in a direction intersecting with a direction in which refrigerant flows, and
wherein an unevenness is formed on the upper surface.
|