US 12,080,578 B2
Front opening unified pod
Kuan-Ting Lin, Taipei (TW)
Assigned to Mega Rich Technologies Inc., Taipei (TW)
Filed by Mega Rich Technologies Inc., Taipei (TW)
Filed on Oct. 17, 2022, as Appl. No. 17/967,395.
Claims priority of application No. 111113199 (TW), filed on Apr. 7, 2022.
Prior Publication US 2023/0326775 A1, Oct. 12, 2023
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67389 (2013.01) 4 Claims
OG exemplary drawing
 
1. A front opening unified pod, comprising:
a container body having a bottom wall, a top wall, two side walls that are connected between said bottom wall and said top wall and that are opposite to each other, a rear wall connected to said bottom wall, said top wall, and said side walls to define a receiving space thereamong, and an opening opposite to said rear wall;
a front door removably connected to said container body to close said opening; and
an air curtain apparatus including at least one air outflow module and an air inflow pipeline connected to said at least one air outflow module, said at least one air outflow module being disposed on one of said top wall and said side walls, being adjacent to said opening, and being located within said receiving space so as to form a laminar air curtain adjacent to said opening for shielding said receiving space;
wherein said at least one air outflow module has a casing and a porous plate, said casing having an elongated base wall and a surrounding wall connected to a periphery of said elongated base wall, said elongated base wall and said surrounding wall cooperatively defining a chamber, said casing further having an air outflow opening opposite to said elongated base wall, and at least one air inlet opening in fluid communication with said air inflow pipeline, said porous plate being connected to said surrounding wall, being disposed in said chamber, and being adjacent to said air outflow opening.