US 12,080,573 B2
Temperature offset and zone control tuning
Ole Luckner, Dresden (DE); Shankar Muthukrishnan, Los Gatos, CA (US); and Wolfgang R. Aderhold, Cupertino, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 3, 2020, as Appl. No. 16/780,460.
Claims priority of provisional application 62/800,859, filed on Feb. 4, 2019.
Prior Publication US 2020/0251362 A1, Aug. 6, 2020
Int. Cl. H01L 21/67 (2006.01); G05B 15/02 (2006.01); H01L 21/324 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/67248 (2013.01) [G05B 15/02 (2013.01); H01L 21/324 (2013.01); H01L 21/67103 (2013.01); H01L 22/26 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method for controlling temperature in a thermal processing chamber, the thermal processing chamber comprising a plurality of heating elements divided into a plurality of concentric zones, each concentric zone of the plurality of concentric zones is part of a group of a plurality of groups, each group of the plurality of groups corresponding to one temperature probe, at least one group of the plurality of groups comprising a first concentric zone and a second concentric zone, the method comprising:
determining temperature sensitivity profiles of one or more of the plurality of concentric zones for a substrate based on measurements of the substrate, wherein a temperature sensitivity profile of the temperature sensitivity profiles illustrates a projected change in temperature across a diameter or a radius of a substrate based on a zone offset value, the zone offset value representing a change in power from a base line power supplied to an individual concentric zone of the plurality of concentric zones;
selecting one or more initial zone offset values for each of the one or more of the plurality of concentric zones;
simulating an adjustment of each of the one or more initial zone offset values to a respective final adjusting zone offset value that achieves a predetermined goal; and
adjusting zone offset values for each of the one or more of the plurality of concentric zones to the respective final adjusting zone offset value, such that a power distribution and a temperature distribution to the one or more of the plurality of concentric zones is changed, wherein changing the power distribution comprises delivering a different level of power to the heating elements in the first concentric zone than the heating elements in the second concentric zone.