CPC H01L 21/67184 (2013.01) [C23C 14/35 (2013.01); H01L 21/67167 (2013.01); H01L 21/67196 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/68707 (2013.01)] | 9 Claims |
1. A substrate processing module, comprising:
a shutter disc stack configured to store a plurality of shutter discs, the shutter disc stack comprising:
a stack base; and
a plurality of shutter disc supports coupled to the stack base, each of the plurality of shutter disc supports configured to support a shutter disc;
at least two processing stations;
a transfer robot configured to transfer at least one of the plurality of shutter discs from the shutter disc stack to each of the at least two processing stations; and
one or more walls of the substrate processing module that define a transfer region,
wherein the transfer robot, the shutter disc stack and at least a portion of the at least two processing stations are disposed within the transfer region of the substrate processing module, wherein the at least a portion of the at least two processing stations comprises:
a sealing region comprising a surface of a sealing assembly that is configured to form a seal between a sealing portion of a substrate support and the surface of the sealing assembly.
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