CPC H01J 49/424 (2013.01) [H01J 49/0018 (2013.01)] | 19 Claims |
1. A device for trapping ions, the device comprising:
a first substrate provided with an upper multi-layer electrode structure implemented at a top side of the first substrate;
a second substrate disposed over the first substrate, the second substrate provided with a lower multi-layer electrode structure implemented at a bottom side of the second substrate; and
one or more first level ion traps configured to trap ions in a space between the first substrate and the second substrate, the one or more first level ion traps comprising the upper multi-layer electrode structure of the first substrate and the lower multi-layer electrode structure of the second substrate.
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