CPC H01J 49/065 (2013.01) [G01N 27/622 (2013.01); H01J 49/0031 (2013.01); H01J 49/0495 (2013.01); H01J 49/24 (2013.01); H01J 49/26 (2013.01)] | 19 Claims |
1. A method comprising:
sliding one or more guide rails of a first ion optic assembly within a guide mechanism of a vacuum chamber housing so as to insert the first ion optic assembly into the vacuum chamber by sliding the first ion optic assembly from outside the vacuum chamber to inside the vacuum chamber, and align the first ion optic assembly within the vacuum chamber.
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