US 12,080,527 B2
Movement systems for sputter coating of non-flat substrates
Wilmert De Bosscher, Drongen (BE); Ivan Van De Putte, Waregem (BE); and Niek Dewilde, Kruishoutem (BE)
Assigned to SOLERAS ADVANCED COATINGS BV, Deinze (BE)
Appl. No. 17/626,244
Filed by SOLERAS ADVANCED COATINGS BV, Deinze (BE)
PCT Filed Jul. 14, 2020, PCT No. PCT/EP2020/069854
§ 371(c)(1), (2) Date Jan. 11, 2022,
PCT Pub. No. WO2021/009158, PCT Pub. Date Jan. 21, 2021.
Claims priority of application No. 2019/5454 (BE), filed on Jul. 14, 2019.
Prior Publication US 2022/0254613 A1, Aug. 11, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); H01J 37/34 (2006.01)
CPC H01J 37/32752 (2013.01) [C23C 14/3407 (2013.01); C23C 14/35 (2013.01); C23C 14/50 (2013.01); C23C 14/505 (2013.01); H01J 37/3405 (2013.01); H01J 37/347 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/3323 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A movement system for moving a non-flat substrate from a load lock compartment across a sputter flux distribution without circumferentially exposing the non-flat substrate to said sputter flux distribution, comprising movement means for:
a first movement of translationally transporting the non-flat substrate from the load lock compartment along the sputter flux distribution, and
an additional second movement of translating and/or rotating the non-flat substrate with respect to the sputter flux distribution.