US 12,080,523 B2
Vacuum processing apparatus and method for controlling vacuum processing apparatus
Kiyoshi Mori, Fuchu (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Aug. 9, 2021, as Appl. No. 17/444,680.
Claims priority of application No. 2020-137294 (JP), filed on Aug. 17, 2020.
Prior Publication US 2022/0051876 A1, Feb. 17, 2022
Int. Cl. H01J 37/32 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/32513 (2013.01) [H01J 37/244 (2013.01); H01J 37/32715 (2013.01); H01J 2237/2006 (2013.01); H01J 2237/20285 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/334 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A vacuum processing apparatus comprising:
a processing container capable of maintaining an inside thereof in a vacuum atmosphere;
a stage provided in the processing container and on which a substrate is placed;
a support member passing through an opening formed at a bottom of the processing container and supporting the stage from below;
a holder part located outside the processing container, wherein an end of the support member is fixed to the holder part to be integrally movable with the stage, and the holder part includes an inner turn portion formed to cover the opening from the outside of the processing container and forming a movable part of a spherical bearing along a circumferential direction of the opening;
a flange part arranged around the opening on the outside of the processing container, wherein the flange part includes an outer turn portion engaged with the inner turn portion and forming a fixed part of the spherical bearing; and
a sealing part configured to be expandable and contractible and provided inside the spherical bearing along the circumferential direction of the opening so as to airtightly seal at least a space between the flange part and the holder part.