US 12,080,519 B2
Smart dynamic load simulator for RF power delivery control system
Jie Yu, Irvine, CA (US); Yue Guo, Sunnyvale, CA (US); Kartik Ramaswamy, San Jose, CA (US); Tao Zhang, San Ramon, CA (US); Shahid Rauf, Pleasanton, CA (US); John Forster, Santa Clara, CA (US); Sidharth Bhatia, Santa Cruz, CA (US); and Rong Gang Zheng, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 17, 2022, as Appl. No. 17/843,830.
Prior Publication US 2023/0411119 A1, Dec. 21, 2023
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32926 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A dynamic load simulator, comprising:
an impedance load;
a reverse match network; and
a smart RF controller, wherein the smart RF controller comprises:
a dynamic load generator; and
a reverse match controller, wherein the dynamic load generator is configured to generate a load impedance output based on inputs comprising the impedance load, RF delivery system parameters, and other measured process parameters, and wherein the reverse match controller is configured to ensure a fidelity of the load impedance output generated by the dynamic load generator.