US 12,080,513 B2
Cross-talk cancellation in multiple charged-particle beam inspection
Wei Fang, Milpitas, CA (US); Lingling Pu, San Jose, CA (US); Bo Wang, Cupertino, CA (US); Zhonghua Dong, Sunnyvale, CA (US); and Yongxin Wang, San Ramon, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/633,176
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Aug. 8, 2020, PCT No. PCT/EP2020/072332
§ 371(c)(1), (2) Date Feb. 4, 2022,
PCT Pub. No. WO2021/028366, PCT Pub. Date Feb. 18, 2021.
Claims priority of provisional application 62/886,882, filed on Aug. 14, 2019.
Prior Publication US 2022/0301811 A1, Sep. 22, 2022
Int. Cl. H01J 37/22 (2006.01); G01N 23/2251 (2018.01); G06T 5/50 (2006.01); G06T 5/77 (2024.01); G06T 5/80 (2024.01); H01J 37/24 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/222 (2013.01) [G01N 23/2251 (2013.01); G06T 5/50 (2013.01); G06T 5/77 (2024.01); G06T 5/80 (2024.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); G01N 2223/07 (2013.01); G01N 2223/401 (2013.01); G01N 2223/418 (2013.01); G01N 2223/507 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20081 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2809 (2013.01); H01J 2237/2817 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method for enhancing an image, the method comprising:
acquiring a first image signal of a plurality of image signals from a detector of a multi-beam inspection system, wherein the first image signal corresponds to a detected signal from a first region of the detector on which electrons of a first secondary electron beam and of a second secondary electron beam are incident;
reducing, from the first image signal, cross-talk contamination originating from the second secondary electron beam using a relationship between the first image signal and beam intensities associated with the first secondary electron beam and the second secondary electron beam; and
generating a first image corresponding to the first secondary electron beam after the reduction.