US 12,080,511 B2
Sample holder, method for using sample holder, projection amount adjustment jig, projection amount adjustment method and charged particle beam device
Megumi Nakamura, Tokyo (JP); Hisayuki Takasu, Tokyo (JP); and Kento Horinouchi, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/754,069
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Sep. 25, 2019, PCT No. PCT/JP2019/037631
§ 371(c)(1), (2) Date Mar. 23, 2022,
PCT Pub. No. WO2021/059401, PCT Pub. Date Apr. 1, 2021.
Prior Publication US 2022/0319802 A1, Oct. 6, 2022
Int. Cl. H01J 37/20 (2006.01); H01J 37/09 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 37/09 (2013.01); H01J 2237/026 (2013.01); H01J 2237/20 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A sample holder used for a charged particle beam device, the sample holder comprising:
a shield plate that includes a first front surface and a first back surface opposite to the first front surface;
a sample stand that is connected to the first back surface of the shield plate;
a pressing member that is configured to move in a first direction perpendicular to the first back surface of the shield plate in a state in which the pressing member is attached to the sample stand, and that has a bar shape;
a sample supporting member that is provided at a position facing the first back surface of the shield plate and is connected to the pressing member; and
an elastic body that is provided along an outer circumference of the pressing member and is connected to the sample supporting member and the sample stand.