US 12,080,454 B2
Nickel chromium aluminum thin film resistor
Gernot Manfred Bauer, Moosburg (DE); and Kai-Alexander Schachtschneider, Rohrbach (DE)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by Texas Instruments Incorporated, Dallas, TX (US)
Filed on Nov. 26, 2021, as Appl. No. 17/535,872.
Prior Publication US 2023/0170111 A1, Jun. 1, 2023
Int. Cl. H01C 7/06 (2006.01); H01C 7/00 (2006.01); H01C 17/00 (2006.01)
CPC H01C 7/06 (2013.01) [H01C 7/006 (2013.01); H01C 17/00 (2013.01)] 35 Claims
OG exemplary drawing
 
1. An integrated circuit comprising:
a thin film resistor body that includes nickel chromium aluminum (NiCrAl) over a dielectric layer, wherein the thin film resistor body has a first thickness;
an interfacial layer on the thin film resistor body, wherein the interfacial layer has a second thickness less than the first thickness; and
resistor heads on the interfacial layer, the resistor heads including titanium tungsten (TiW).