US 12,080,149 B2
Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
Masanori Okuno, Toyama (JP); Junichi Kawasaki, Toyama (JP); Shinichiro Mori, Toyama (JP); Yasuhiro Joho, Toyama (JP); and Satomi Yamazaki, Toyama (JP)
Assigned to Kokusai Electric Corporation, Tokyo (JP)
Filed by Kokusai Electric Corporation, Tokyo (JP)
Filed on Aug. 5, 2022, as Appl. No. 17/882,172.
Application 17/882,172 is a continuation of application No. PCT/JP2021/004810, filed on Feb. 9, 2021.
Claims priority of application No. 2020-050145 (JP), filed on Mar. 19, 2020.
Prior Publication US 2022/0375331 A1, Nov. 24, 2022
Int. Cl. G08B 29/04 (2006.01); F27D 21/04 (2006.01); G05B 23/02 (2006.01); F27B 17/00 (2006.01); G08B 21/18 (2006.01); H01L 21/673 (2006.01)
CPC G08B 29/04 (2013.01) [F27D 21/04 (2013.01); G05B 23/027 (2013.01); F27B 17/0025 (2013.01); G08B 21/182 (2013.01); H01L 21/67313 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A processing apparatus comprising
an apparatus controller comprising a memory configured to store apparatus data containing at least monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing at least analysis items used for analyzing a cause of the alarm,
wherein the apparatus controller is configured to be capable of:
outputting the alarm containing an alarm ID for specifying a type of the alarm indicating the failure and an occurrence time of the alarm when the failure is detected;
specifying candidates of the analysis items from the alarm ID;
acquiring a plurality of monitor data corresponding to the specified candidates;
determining a rank of the cause of the alarm in accordance with a difference between a value of each of the plurality of monitor data at the occurrence time of the alarm and a predetermined threshold value by comparing each of the plurality of monitor data with the threshold value; and
displaying a relationship between the value of each of the plurality of monitor data and the threshold value in chronological order on a display screen, and
wherein the display screen comprises a region in which an occurrence history of a plurality of alarms comprising the alarm is displayed and a region in which a history of acquiring the plurality of monitor data in accordance with the rank is displayed together with the value of each of the plurality of monitor data, the rank, the threshold value and the occurrence time of the alarm,
wherein the apparatus controller is further configured to be capable of, when the alarm is generated but no apparatus data related to the alarm exceeds a pre-set threshold value, identifying a specific apparatus data among a plurality of apparatus data closest to the pre-set threshold value as a factor of generating the alarm.