| CPC G06F 30/23 (2020.01) [G03F 7/0002 (2013.01); G06F 2113/08 (2020.01)] | 11 Claims |
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1. A control method of controlling a film forming apparatus of bringing a plurality of droplets of the curable composition arranged on one of a first member or a second member into contact with another of the first member or the second member and forming a film of the curable composition on the first member, the control method comprising:
predicting a behavior of the plurality of droplets of the curable composition simultaneously,
setting a forming condition based on the behavior of the curable composition predicted in the step of predicting, and
forming the film on the basis of the forming condition in the step of setting,
the step of predicting includes the following steps:
acquiring simulation information including at least arrangement information of the plurality of droplets and volume information of each droplets corresponding to the condition of forming the film by the film forming apparatus;
acquiring a distance between the first member and the second member at a predetermined timing corresponding to the condition of forming the film by the film forming apparatus;
calculating, for each of the plurality of droplets of the curable composition on the one of the first member or the second member, a distance from a representative point inside the droplet to each of the plurality of the points on a contour of the droplet at the predetermined timing in the forming apparatus corresponding to a period from a timing of bringing the plurality of droplets of the curable composition arranged on the first member into contact with the second member until a timing of curing the curable composition, based on the simulation information and the distance between the first member and the second member in the step of acquiring; and
determining, for each of the plurality of droplets of the curable composition on the one of the first member or the second member, whether one of droplets among the plurality of droplets merges with an adjacent droplet at the predetermined timing based on a positional coordinate of the representative point inside the droplet, and the distances from the representative point inside the droplet to each of the plurality of points defined on the contour of the droplet,
wherein in the step of calculating, defining, for each of the plurality of droplets of the curable composition on one of the first member or the second member, the plurality of points defined on the contour of the droplet based on the positional coordinate of the representative point of droplet and a plurality of directions extending around the representative point,
wherein the representative point is included in the droplet corresponding to the representative point,
wherein the plurality of droplets includes a first droplet and a second droplet adjacent to the first droplet, and
wherein in the step of determining, it is determined that the first droplet and the second droplet are merged at the predetermined timing, in case of at least one of the plurality of points defined on the contour of the first droplet is located inside an area of the second droplet,
wherein at least each of the step of acquiring the distance, the step of calculating and the step of determining is performed multiple times during a period from a timing of bringing the first member and the second member into contact via the plurality of droplets of the curable composition to a timing of curing the film of the curable composition, and
wherein the predetermined timing is a timing within the period.
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