| CPC G03F 7/0002 (2013.01) [G03F 9/7042 (2013.01)] | 8 Claims |
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1. An imprint method of performing an imprint process including a contacting step of bringing a mold into contact with an imprint material supplied onto a substrate, a curing step of curing the imprint material in a state in which the imprint material and the mold are in contact with each other, and a separating step of separating the mold from the cured imprint material, the method comprising:
performing a global alignment measurement on two or more shot regions of a plurality of shot regions to acquire global alignment information including information for specifying position coordinates of each of a plurality of shot regions including a first shot region, which is a peripheral shot region having a partial field where a portion of a pattern of the mold is transferred to the substrate, and a second shot region of the substrate, which is a non-peripheral shot region having a full field where all of the pattern of the mold is transferred to the substrate;
moving, based on the acquired global alignment information, the second shot region to a measurement position at which a measurement device performs measurement, and performing a pre-alignment measurement to acquire a local first relative positional shift between the second shot region and the mold using the measurement device; and
moving, based on both the global alignment information and the measured local first relative positional shift of the second shot region that is different from the first shot region and is near the first shot region, the first shot region to an imprint position at which the imprint process is performed, and starting the contacting step.
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