US 12,078,922 B2
Template, workpiece, and alignment method
Takashi Sato, Kanagawa (JP); Takeshi Suto, Kanagawa (JP); and Satoshi Mitsugi, Kanagawa (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Sep. 10, 2021, as Appl. No. 17/472,387.
Claims priority of application No. 2021-049180 (JP), filed on Mar. 23, 2021.
Prior Publication US 2022/0308440 A1, Sep. 29, 2022
Int. Cl. G03F 1/42 (2012.01); G01B 11/27 (2006.01); G03F 7/00 (2006.01); G03F 9/00 (2006.01); H01L 23/544 (2006.01)
CPC G03F 1/42 (2013.01) [G01B 11/27 (2013.01); G03F 7/0002 (2013.01); G03F 9/7042 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01); H01L 2223/54466 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A template comprising:
an alignment mark,
wherein the alignment mark includes a first main pattern in which a first part and a second part are disposed in at least a first direction as a predetermined repeating pattern and a first auxiliary pattern in which the first part and the second part are configured as a pattern opposite to the repeating pattern in a region outside an end of the first main pattern in a second direction intersecting the first direction,
the first auxiliary pattern includes a third part in a region corresponding to the second part, and
in the second direction of the alignment mark, a phase of noise at the end of the first part of the first main pattern and a phase of noise at the end of the third part of the first auxiliary pattern are reversed by 180°.