CPC G03F 1/32 (2013.01) [G03F 1/24 (2013.01); G03F 7/70283 (2013.01)] | 19 Claims |
1. A reticle, comprising:
a substrate;
a reflective structure disposed over the substrate;
a pattern defining layer, comprising a first material, deposited over the reflective structure, wherein the pattern defining layer comprises a pattern trench; and
a phase shifter, comprising a second material, disposed in the pattern trench, wherein a transmittance of the second material is different from a transmittance of the first material, and wherein a ratio of the transmittance of the first material to a transmittance of the second material is in a range of about 0.62 to about 0.98.
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