US 12,078,830 B2
Optical interference filter with aluminum nitride layers
Georg J. Ockenfuss, Santa Rosa, CA (US); Jinhui Yang, Santa Rosa, CA (US); Marius Grigonis, Santa Rosa, CA (US); Karen Denise Hendrix, Santa Rosa, CA (US); and Andy Shkabko, Santa Rosa, CA (US)
Assigned to VIAVI Solutions Inc., Chandler, AZ (US)
Filed by VIAVI Solutions Inc., San Jose, CA (US)
Filed on Dec. 1, 2021, as Appl. No. 17/457,123.
Prior Publication US 2023/0168418 A1, Jun. 1, 2023
Int. Cl. G02B 5/28 (2006.01); G02B 1/10 (2015.01)
CPC G02B 5/286 (2013.01) [G02B 1/10 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical interference filter, comprising:
a substrate; and
a set of layers that are disposed on the substrate, wherein the set of layers includes:
a first subset of layers; and
a second subset of layers, wherein:
each of the first subset of layers comprises an aluminum nitride (AlN) material,
a stress of each of the first subset of layers is between −1000 and 800 megapascals,
the first subset of layers has a first refractive index with a first value,
each of the second subset of layers comprises at least one other material,
the second subset of layers has a second refractive index with a second value that is different than the first value, and
the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.